Diagnosis pf Be-D magnetron, plasma operated in bipolar HiPIMS

Publication type:

Conference / Workshop

Authors:

P. Dinca, V. Tiron, B. Butoi, O.G Pompilian, C. Staicu, V. Ciupina, C.P. Lungu

Year:

2021

Conference / Workshop data

Conference / Workshop:

19th International Conference on Plasma Physics and Application

Period:

31 august-3septembrie 2021