Diagnosis of Be-Ne-D magnetron plasma operated in bipolar HiPIMS mode

Publication type:

Conference / Workshop

Authors:

P. Dinca, V. Tiron, B. Butoi, O.G. Pompilian, C. Staicu, V. Ciupina, C.P. Lungu

Year:

2021

Conference / Workshop data

Conference / Workshop:

Eleventh International Conference on HIPIMS 2021

Period:

16 iunie-18 iunie 2021