Magnetron sputtering gas aggregation cluster source operated in plasma jet mode

Publication type:

Conference / Workshop

Authors:

Tomy Acsente, Veronica Satulu, Marian Cosmin Istrate, Bogdan Bita and Gheorghe Dinescu

Year:

2021

Conference / Workshop data

Conference / Workshop:

19th International Conference on Plasma Physics and Applications (CPPA 2021)

Location:

Magurele, Romania

Period:

August 31st – September 3rd 2021

Presentation method:

oral presentation