Magnetron sputtering gas aggregation cluster source operated in plasma jet mode

Publication type: 
Conference / Workshop
Authors: 
Tomy Acsente, Veronica Satulu, Marian Cosmin Istrate, Bogdan Bita and Gheorghe Dinescu
Year: 
2021

Conference / Workshop data

Conference / Workshop: 
19th International Conference on Plasma Physics and Applications (CPPA 2021)
Location: 
Magurele, Romania
Period: 
August 31st – September 3rd 2021
Presentation method: 
oral presentation