In-situ plasma monitoring during pulsed laser deposition of various oxides: O2 pressure role in tailoring thin film properties

Publication type:

Conference / Workshop

Authors:

SA Irimiciuc, M Novotny, L Volfova, JM Chevalier, L Fekete, J Fara, V Craciun, J Lancok

Year:

2021

Conference / Workshop data

Conference / Workshop:

E-MRS 2021 Spring Meeting

Location:

Virtual Conference

Period:

31 May-3 June 2021

Presentation method:

oral presentation