Growth and characterization of W thin films with controlled Ne and Ar contents deposited by bipolar HiPIMS

Publication type:

Journal

Authors:

Tiron, V; Bulai, G; Costin, C; Velicu, IL; Dinca, P; Iancu, D; Burducea, I

Year:

2021

DOI:

10.1016/j.nme.2021.101091

Journal data

Journal:

NUCLEAR MATERIALS AND ENERGY

Vol.:

Pag.:

101091