Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization

Publication type:

Journal

Authors:

Cristea, D; Velicu, IL; Cunha, L; Barradas, N; Alves, E; Craciun, V

Year:

2021

DOI:

http://dx.doi.org/10.3390/coatings12010036

Journal data

Journal:

COATINGS

Vol.:

Issue:

Pag.: