Tailoring pulsed laser deposition of phosphorus doped WOx films from (PO2)(4)(WO3)(4) target by space-resolved optical emission spectroscopy

Publication type:

Journal

Authors:

More-Chevalier, J; Irimiciuc, SA; Volfova, L; Fekete, L; Chertopalov, S; Poupon, M; Duverger-Nedellec, E; Herve, L; Novotny, M; Perez, O; Lancok, J

Year:

2022

DOI:

10.1016/j.tsf.2021.139042

Journal data

Journal:

THIN SOLID FILMS

Vol.:

742

Pag.:

139042