Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization

Publication type: 
Journal
Authors: 
Cristea, D; Velicu, IL; Cunha, L; Barradas, N; Alves, E; Craciun, V
Year: 
2022
DOI: 
10.3390/coatings12010036

Journal data

Journal: 
COATINGS
Vol.: 
12
Issue: 
1
Pag.: 
36