Modelling the strain build-up in nitrogen implanted tungsten films on silicon substrates

Publication type:

Conference / Workshop

Authors:

Sérgio Magalhães, Rodrigo Mateus, Marta Dias, C. Porosnicu, O. G. Pompilian, Eduardo Alves

Year:

2022

Conference / Workshop data

Conference / Workshop:

22th International Conference on Ion Beam Modification of Materals

Location:

Lisabona, Portugalia

Period:

10-15 July 2022

Presentation method:

oral presentation