Modulation of Structural, Electronic, and Optical Properties of Titanium Nitride Thin Films by Regulated In Situ Oxidation

Publication type:

Journal

Authors:

Roy, M; Sarkar, K; Som, J; Pfeifer, MA; Craciun, V; Schall, JD; Aravamudhan, S; Wise, FW; Kumar, D

Year:

2023

DOI:

10.1021/acsami.2c18926

Journal data

Journal:

Acs Applied Materials & Interfaces

Vol.:

Issue:

Pag.:

4733-4742