Deposition of sputtered NiO as a p-type layer for heterojunction diodes with Ga2O3

Publication type:

Journal

Authors:

Li, JS; Xia, XY; Chiang, CC; Hays, DC; Gila, BP; Craciun, V; Ren, F; Pearton, SJ

Year:

2023

DOI:

10.1116/6.0002250

Journal data

Journal:

Journal of Vacuum Science & Technology A

Vol.:

Issue:

Pag.:

Article Number 013405