Modelling the strain build-up in nitrogen implanted tungsten films on silicon substrates

Publication type:

Journal

Authors:

S. Magalhaes, R. Mateus, M. Dias, C. Porosnicu, O.G. Pompilian, E. Alves

Year:

2023

DOI:

10.1016/j.nimb.2023.02.006

Journal data

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Vol.:

537

Pag.:

81-87