Mass Spectra Fitting as Diagnostic Tool for Magnetron Plasmas Generated in Ar and Ar/H2 Gases with Tungsten Targets

Publication type: 
Journal
Authors: 
Craciun, C; Stoica, SD; Mitu, BM; Acsente, T; Dinescu, G
Year: 
2023
DOI: 
https://doi.org/10.3390/molecules28155664

Journal data

Journal: 
Molecules
Vol.: 
28
Issue: 
15
Pag.: 
5664