
Enhancement of W Nanoparticles Synthesis by Injecting H2 in a Magnetron Sputtering Gas Aggregation Cluster Source Operated in Ar
Publication type:
Journal
Year:
2024
DOI:
10.1007/s11090-024-10499-z Journal data
Journal:
Plasma Chemistry And Plasma, Processing
Vol.:
44
Pag.:
2233–2246