Enhancement of W nanoparticles synthesis by injecting H2 in a magnetron sputtering gas aggregation cluster source operated in Ar

Publication type: 
Journal
Authors: 
T. Acsente, S. D. Stoica, C. Craciun, B. Mitu, G. Dinescu
Year: 
2024
DOI: 
10.1007/s11090-024-10499-z

Journal data

Journal: 
Plasma Chem. Plasma Process
Vol.: 
44
Pag.: 
2233–2246