![fiipregatit](https://inflpr.ro/sites/all/themes/fast.png)
HiPIMS Ion Energy Distribution Measurements in Reactive Mode
- 2010 |
- Publications |
- Journals
Publication type:
Journal
Year:
2010
DOI:
http://dx.doi.org/10.1109/TPS.2010.2073688 Journal data
Journal:
IEEE TRANSACTIONS ON PLASMA SCIENCE
Vol.:
38
Pag.:
3089 3094