Specificity of defects induced in silicon by RF-plasma hydrogenation

Publication type:

Journal

Authors:

Ghica, C; Nistor, LC; Stefan, M; Ghica, D; Mironov, B; Vizireanu, S; Moldovan, A; Dinescu, M

Year:

2010

DOI:

http://dx.doi.org/10.1007/s00339-009-5527-1

Journal data

Journal:

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Vol.:

Pag.:

777 785