THE CHARACTERIZATION OF GRATINGS USING THE OPTICAL SCATTEROMETER

Publication type: 
Journal
Authors: 
Logofatu, PC; McNeil, JR; Sima, A; Ionita, B; Garoi, F; Apostol, D
Year: 
2010

Journal data

Journal: 
ROMANIAN JOURNAL OF PHYSICS
Vol.: 
55
Pag.: 
376 385