High diffraction order grating interferometer for pitch measurement

Publication type: 
Journal
Authors: 
Apostol, D; Udrea, C; Garoi, F; Vasile, T; Logofatu, PC
Year: 
2011
DOI: 
http://dx.doi.org/10.1117/1.3633332

Journal data

Journal: 
OPTICAL ENGINEERING
Vol.: 
50
Pag.: 
105601