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Silicon structuring by etching with liquid chlorine and fluorine precursors using femtosecond laser pulses
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Year:
2011
DOI:
http://dx.doi.org/10.1063/1.3619856 Journal data
Journal:
JOURNAL OF APPLIED PHYSICS
Vol.:
110
Pag.:
34901