Silicon structuring by etching with liquid chlorine and fluorine precursors using femtosecond laser pulses

Publication type:

Journal

Authors:

Radu, C; Simion, S; Zamfirescu, M; Ulmeanu, M; Enculescu, M; Radoiu, M

Year:

2011

DOI:

http://dx.doi.org/10.1063/1.3619856

Journal data

Journal:

JOURNAL OF APPLIED PHYSICS

Vol.:

110

Pag.:

34901