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Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Year:
2011
DOI:
http://dx.doi.org/10.1016/j.tsf.2011.04.065 Journal data
Journal:
THIN SOLID FILMS
Vol.:
519
Pag.:
6381 6387