Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

Publication type:

Journal

Authors:

Ristoscu, C; Ghica, C; Papadopoulou, EL; Socol, G; Gray, D; Mironov, B; Mihailescu, IN; Fotakis, C

Year:

2011

DOI:

http://dx.doi.org/10.1016/j.tsf.2011.04.065

Journal data

Journal:

THIN SOLID FILMS

Vol.:

519

Pag.:

6381 6387