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Carbon layers cleaning from inside of narrow gaps by a RF glow discharge
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Year:
2011
DOI:
http://dx.doi.org/10.1016/j.surfcoat.2011.03.090 Journal data
Journal:
SURFACE & COATINGS TECHNOLOGY
Vol.:
205
Pag.:
S435 S438