Carbon layers cleaning from inside of narrow gaps by a RF glow discharge

Publication type: 
Journal
Authors: 
Stancu, C; Teodorescu, M; Galca, AC; Dinescu, G
Year: 
2011
DOI: 
http://dx.doi.org/10.1016/j.surfcoat.2011.03.090

Journal data

Journal: 
SURFACE & COATINGS TECHNOLOGY
Vol.: 
205
Pag.: 
S435 S438