Properties of composite a-C:H/metal layers deposited by combined RF PECVD/magnetron sputtering techniques

Publication type:

Journal

Authors:

Acsente, T; Ionita, ER; Colceag, D; Moldovan, A; Luculescu, C; Birjega, R; Dinescu, G

Year:

2011

DOI:

http://dx.doi.org/10.1016/j.tsf.2011.01.201

Journal data

Journal:

THIN SOLID FILMS

Vol.:

519

Pag.:

4054 4058