Structural characterization of AlN films synthesized by pulsed laser deposition

Publication type: 
Journal
Authors: 
Szekeres, A; Fogarassy, Z; Petrik, P; Vlaikova, E; Cziraki, A; Socol, G; Ristoscu, C; Grigorescu, S; Mihailescu, IN
Year: 
2011
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2010.10.043

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
257
Pag.: 
5370 5374