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Structural characterization of AlN films synthesized by pulsed laser deposition
- 2011 |
- Publications |
- Journals
Publication type:
Journal
Year:
2011
DOI:
http://dx.doi.org/10.1016/j.apsusc.2010.10.043 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
257
Pag.:
5370 5374