Structural characterization of AlN films synthesized by pulsed laser deposition

Publication type:

Journal

Authors:

Szekeres, A; Fogarassy, Z; Petrik, P; Vlaikova, E; Cziraki, A; Socol, G; Ristoscu, C; Grigorescu, S; Mihailescu, IN

Year:

2011

DOI:

http://dx.doi.org/10.1016/j.apsusc.2010.10.043

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

257

Pag.:

5370 5374