SiO2-METAL CANTILEVER STRUCTURES UNDER THERMAL AND INTRINSIC STRESS

Publication type:

Journal

Authors:

Tibeica, C; Damian, V; Muller, R

Year:

2011

Journal data

Journal:

2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2

Vol.:

Pag.:

167 170