CHARACTERIZATION OF Ti-O-N FILMS DEPOSITED ON Ti-Ta-Nb SUBSTRATE BY PLASMA LASER DEPOSITION

Publication type:

Journal

Authors:

Cojocaru, VD; Raducanu, D; Scarisoreanu, ND; Cinca, I

Year:

2011

Journal data

Journal:

2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2

Vol.:

Pag.:

265 268