Very hard TiN thin films grown by pulsed laser deposition

Publication type:

Journal

Authors:

Craciun, D; Stefan, N; Socol, G; Dorcioman, G; McCumiskey, E; Hanna, M; Taylor, CR; Bourne, G; Lambers, E; Siebein, K; Craciun, V

Year:

2012

DOI:

http://dx.doi.org/10.1016/j.apsusc.2011.11.128

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

260

Pag.:

2 6