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Very hard TiN thin films grown by pulsed laser deposition
- 2012 |
- Publications |
- Journals
Publication type:
Journal
Year:
2012
DOI:
http://dx.doi.org/10.1016/j.apsusc.2011.11.128 Journal data
Journal:
APPLIED SURFACE SCIENCE
Vol.:
260
Pag.:
2 6