Influence of thermal treatment in N-2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films
- 2013 |
- Publications |
- Journals
Publication type:
Journal
Year:
2013
DOI:
http://dx.doi.org/10.1016/j.tsf.2012.11.135 Journal data
Journal:
THIN SOLID FILMS
Vol.:
541
Pag.:
121 126