SAW sensor based on highly sensitive nanoporous palladium thin film for hydrogen detection
- 2013 |
- Publications |
- Journals
Publication type:
Journal
Year:
2013
DOI:
http://dx.doi.org/10.1016/j.mee.2012.12.001 Journal data
Journal:
MICROELECTRONIC ENGINEERING
Vol.:
108
Pag.:
218 221