SILICON SURFACE STRUCTURING BY XeCl EXCIMER LASER IRRADIATION IN ATMOSPHERIC CONDITIONS

Publication type: 
Journal
Authors: 
Sava, V; Mitran, TL; Socol, G; Antohe, S
Year: 
2013

Journal data

Journal: 
DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES
Vol.: 
8
Pag.: 
61 68