Characterization of tungsten films and their hydrogen permeability

Publication type: 
Journal
Authors: 
Nemanic, V; Kovac, J; Lungu, C; Porosnicu, C; Zajec, B
Year: 
2014
DOI: 
http://dx.doi.org/10.1116/1.4898061

Journal data

Journal: 
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Vol.: 
32
Pag.: 
61511