The effect of deposition atmosphere on the chemical composition of TiN and ZrN thin films grown by pulsed laser deposition

Publication type:

Journal

Authors:

Craciun, D; Socol, G; Stefan, N; Dorcioman, G; Hanna, M; Taylor, CR; Lambers, E; Craciun, V

Year:

2014

DOI:

http://dx.doi.org/10.1016/j.apsusc.2013.10.095

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

302

Pag.:

124 128