Laser parallel nanofabrication by single femtosecond pulse near-field ablation using photoresist masks
- 2014 |
- Publications |
- Journals
Publication type:
Journal
Year:
2014
DOI:
http://dx.doi.org/10.1364/OE.22.003356 Journal data
Journal:
OPTICS EXPRESS
Vol.:
22
Pag.:
3356 3361