The effect of the substrate temperature and the acceleration potential drop on the structural and physical properties of SiC thin films deposed by TVA method

Publication type: 
Journal
Authors: 
Ciupina, V; Lungu, CP; Vladoiu, R; Prodan, GC; Antohe, S; Porosnicu, C; Stanescu, I; Jepu, I; Iftimie, S; Prodan, M; Mandes, A; Dinca, V; Vasile, E; Zarovski, V; Nicolescu, V
Year: 
2014
DOI: 
http://dx.doi.org/10.1117/12.2061186

Journal data

Journal: 
NANOSTRUCTURED THIN FILMS VII
Vol.: 
9172
Pag.: 
91720Y