Composition and structure variation for magnetron sputtered tantalum oxynitride thin films, as function of deposition parameters

Publication type:

Journal

Authors:

Cristea, D; Patru, M; Crisan, A; Munteanu, D; Craciun, D; Barradas, NP; Alves, E; Apreutesei, M; Moura, C; Cunha, L

Year:

2015

DOI:

http://dx.doi.org/10.1016/j.apsusc.2015.09.022

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

358

Pag.:

508 517