Electrical characterization of Si doped AlN films synthesized by pulsed laser deposition

Publication type:

Journal

Authors:

Simeonov, S; Bakalova, S; Szekeres, A; Minkov, I; Socol, G; Ristoscu, C; Mihailescu, I

Year:

2015

DOI:

http://dx.doi.org/10.1051/epjap/2015140163

Journal data

Journal:

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS

Vol.:

Pag.:

10102