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Characterization of Nano-Scale Protective Oxide Films: Application on Metal Chemical Mechanical Planarization
- 2015 |
- Publications |
- Journals
Publication type:
Journal
Year:
2015
DOI:
http://dx.doi.org/10.1149/2.0151412jss Journal data
Journal:
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
Vol.:
4
Pag.:
P1 P8