Characterization of Nano-Scale Protective Oxide Films: Application on Metal Chemical Mechanical Planarization

Publication type: 
Journal
Authors: 
Karagoz, A; Craciun, V; Basim, GB
Year: 
2015
DOI: 
http://dx.doi.org/10.1149/2.0151412jss

Journal data

Journal: 
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
Vol.: 
4
Pag.: 
P1 P8