High atomic diffusivity during pulsed laser irradiation of TiON quasi-amorphous films

Publication type:

Journal

Authors:

Teodorescu, VS; Maraloiu, AV; Negrea, RF; Ghica, D; Scarisoreanu, ND; Dinescu, M; Gartner, M; Blanchin, MG

Year:

2016

DOI:

http://dx.doi.org/10.1016/j.apsusc.2015.11.188

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

374

Pag.:

248 251