Investigations of Ar ion irradiation effects on nanocrystalline SiC thin films

Publication type:

Journal

Authors:

Craciun, V; Craciun, D; Socol, G; Behdad, S; Boesl, B; Himcinschi, C; Makino, H; Socol, M; Simeone, D

Year:

2016

DOI:

http://dx.doi.org/10.1016/j.apsusc.2015.12.130

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

374

Pag.:

339 345