Characterization of hydrogenated and deuterated silicon carbide films codeposited by magnetron sputtering

Publication type:

Journal

Authors:

Pantelica, D; Ionescu, P; Petrascu, H; Dracea, MD; Statescu, M; Matei, E; Rasoga, O; Stancu, C; Marascu, V; Ion, V; Acsente, T; Dinescu, G

Year:

2016

DOI:

http://dx.doi.org/10.1016/j.nimb.2015.10.060

Journal data

Journal:

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Vol.:

371

Pag.:

322 326