Influence of laser pulse frequency on the microstructure of aluminum nitride thin films synthesized by pulsed laser deposition

Publication type:

Journal

Authors:

Antonova, K; Duta, L; Szekeres, A; Stan, GE; Mihailescu, IN; Anastasescu, M; Stroescu, H; Gartner, M

Year:

2017

DOI:

http://dx.doi.org/10.1016/j.apsusc.2016.10.114

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

394

Pag.:

197 204