Hydrogen effect on structure and mechanical properties of ZnO films deposited in Ar/H2 plasma

Publication type: 
Conference / Workshop
Authors: 
R. Bartali, V. Micheli, G. Gottardi, I. Luciu, N. Laidani
Year: 
2010

Conference / Workshop data

Conference / Workshop: 
CIMTEC 2010
Location: 
Montecatini (FI)
Period: 
06-11.06.2010

Journal data

Journal: 
Advances in Science and Technology, Trans Tech Publications
Vol.: 
66
Pag.: 
156- 161