OES monitoring of combined deposition of C/W layers by PECVD/Magnetron Sputtering techniques

Publication type:

Conference / Workshop

Authors:

T. Acsente, E. R. Ionita, C. Stancu, M. D. Ionita, G. Dinescu

Year:

2010

Conference / Workshop data

Conference / Workshop:

12th International Conference on Plasma Surface Engineering, PSE 2010

Location:

Garmisch-Partenkirchen, Germania

Period:

12-17 septembrie 2010

Presentation method:

Poster Presentation