RF sputtering of oxide films in Ar and Ar-H2 gas mixtures: role of H incorporation in developing transparent conductive coatings

Publication type:

Conference / Workshop

Authors:

G. Gotardi, R. Bartali, V. Micheli, I. Luciu, N. Laidani

Year:

2010

Conference / Workshop data

Conference / Workshop:

12th International Conference on Plasma Surface Engineering (PSE 2010)

Location:

Garmish-Partenkirchen, Germany

Period:

13-17 September 2010

Presentation method:

Invited Presentation