Combinatorial Thin Films Deposition by Dual Thermionic Vacuum Arc

Publication type:

Conference / Workshop

Authors:

C.P. Lungu, A. Marcu, C. Porosnicu, I. Jepu, J. Kovac, V. Nemanic

Year:

2011

Conference / Workshop data

Conference / Workshop:

E-MRS 2011 Spring Meeting

Location:

Nice, France

Period:

May 9-13, 2011