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Characterisation and erosion of tungsten nitride multilayers grown by Magnetron/PECVD sputtering in Magnum-PSI
Publication type:
Conference / Workshop
Year:
2013 Conference / Workshop data
Conference / Workshop:
16th INTERNATIONAL CONFERENCE ON PLASMA PHYSICS AND APPLICATIONS (CPPA)
Location:
Magurele, Romania
Period:
20
Presentation method:
Poster Presentation