Characterisation and erosion of tungsten nitride multilayers grown by Magnetron/PECVD sputtering in Magnum-PSI

Publication type: 
Conference / Workshop
Authors: 
Alegre D, Acsente T, Martin-Rojo AB, Oyarzabal E, Tabar
Year: 
2013

Conference / Workshop data

Conference / Workshop: 
16th INTERNATIONAL CONFERENCE ON PLASMA PHYSICS AND APPLICATIONS (CPPA)
Location: 
Magurele, Romania
Period: 
20
Presentation method: 
Poster Presentation