On the metrology of amorphous transparent and conductive oxides grown by combinatorial pulsed laser deposition

Publication type:

Conference / Workshop

Authors:

G. Socol, E. Axente, J. Hermann, A. C. Galca, D. Pantelica, P. Ionescu, N. Becherescu, C. Martin, V. Craciun

Year:

2014

Conference / Workshop data

Conference / Workshop:

IUMRS-ICEM

Location:

Taipei, Taiwan

Period:

June 10-14 2014

Presentation method:

Invited Presentation