Influence of H2 flow rate on the morphology of carbon films obtained by PECVD in a low pressure RF plasma jet

Publication type:

Conference / Workshop

Authors:

S.D. Stoica, S. Vizireanu, C.R. Luculescu, M. Bazavan, G. Dinescu

Year:

2016

Conference / Workshop data

Conference / Workshop:

23rd Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)

Location:

Bratislava, Slovakia

Period:

July 12-16