TEM and AFM studies of aluminium nitride films synthesized by pulsed laser deposition

Publication type:

Journal

Authors:

Fogarassy, Z; Petrik, P; Duta, L; Mihailescu, IN; Anastasescu, M; Gartner, M; Antonova, K; Szekeres, A

Year:

2017

DOI:

http://dx.doi.org/10.1007/s00339-017-1296-4

Journal data

Journal:

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Vol.:

123

Pag.:

UNSP 756