Chalcogenide thin films deposited by rfMS technique using a single quaternary target

Publication type: 
Journal
Authors: 
Prepelita, P; Stavarache, I; Negrila, C; Garoi, F; Craciun, V
Year: 
2017
DOI: 
http://dx.doi.org/10.1016/j.apsusc.2016.11.071

Journal data

Journal: 
APPLIED SURFACE SCIENCE
Vol.: 
424
Pag.: 
421 427